| SPECIFICATIONS： | | | Physical | Excel6120 | Excel 6220 | | Measuring Volume | 1200*1500*150mm(47.2"*59.0"*5.9") | | External Dimensions | L2590*W1855*H1725(102"*73"*88") | | Weight | 3410kg(7500lb) | | Capacity | 100kg(220lb) | | Stage | Steel | | Base Mdterial | Granite | | Ways | Unique X&Y Monorail,Monorail Linear Z | | Motion Cortrol | Servo:CNC,Moues,and Pendant Control | | Power Requirements | 93-264VAC,47-63Hz,10Amp max. | | Performance | Excel 6120 | Excel 6220 | | XY Accuracy | U=5.5+L/300µm | | Z Accuracy | U=3.0+L/150µm | | XY Repeat | 5.5µm(0.000220") | | Z Repeatability | 3.0µm(0.000120") | | X,Y Acceleration | 1000mm/s2(40"/s2) | | Z Acceleration | 500mm/s2(20"/s2) | | X,Y Speed | 150mm/s2(20"/s2) | | Scale Resolution | 0.5µm(0.000020") | | Features | Excel 6120 | Excel 6220 | | Video | Hi-Res B&W | Hi-Res Color | | lllumination Source | Red LEDs | White LEDs | | Lighting | Surface,Profile,and Axial | | Optics/Magnification | 12:1 Programmable Zoom/～17x-400x | | Software | InSpec for Windows Metrolongy Software | | Computer | 1.2GHz,256MB RAM,Windows2000,CD-RW,Ethernet Card | | Environmental | 20℃(680F)±20,30-80% Humiditiy | | Warranty | 1Year Parts and Service |
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